Description

During my PhD, I designed a multipurpose gas and vacuum chamber for MEMS testing. The chamber features a main body with inlet and outlet ports for gas flow, a sealed 12-pin electrical connector, and a cover with a 97% anti-reflective glass port for optical access. To enable vacuum operation, one of the gas ports is securely sealed with a block nut (blanking plug), while the other is connected to a vacuum pump. This design allows for precise MEMS characterization in both gas and vacuum environments.